The straightforward proof is almost identical to that of Lemma 3.2 in [BlairSoggeRefined] or Lemma 4.3 in [SBLog]; however, we shall present it for the sake of completeness. Note note that when \theta\approx 1, this result is standard. See, e.g., Lemma 4.3 in [SFIO2], and the proof of our results are just a small variation on that of this standard one.
We recall that
\tilde \sigma_\lambda =(2\pi)^{-1}\int e^{i\lambda t}
\bigl(B\circ e^{-itP}\bigr)\, \Hat \rho(t) \, dt.
Since \bigl(Be^{-itP}\bigr)(x,y) is smooth near (x,y,t) if d_g(x,y)\ne |t| and \Hat \rho(t)=0 for |t-\delta|>\delta_0, we clearly have the first part of (5.4). The second part similarly comes from the fact that by (?) the symbol of A^{c_0\theta}_\mu, \mu=\nu,\nu', vanishes if \xi is not in a small conic neighborhood of (0,\dots,0,1).
Recall B\in S^0_{1,0} has symbol B(x,\xi) vanishing when |\xi| is not comparable to \lambda or when (x,\xi) is not in a small conic neighborhood of (0,(0,\dots,0,1)) if \delta is small. Therefore, using the calculus of Fourier integrals for |t|<2\delta with \delta as in (?), modulo smoothing errors,
\begin{gathered}
\bigl(Be^{-itP}\bigr)(x,y)=
(2\pi)^{-n}\int e^{iS(t,x,\xi)-iy\cdot \xi}\alpha(t,x,\xi)\, d\xi
\\
=(2\pi)^{-n}\lambda^n \int e^{i\lambda (S(t,x,\xi)-y\cdot\xi) }
\alpha(t,x,\lambda \xi) \, d\xi,
\end{gathered}
where \alpha\in S^0_{1,0} also vanishes when |\xi| is not comparable to \lambda or (x,\xi) is not in a small conic neighborhood of (0,(0,\dots,0,1)). Also, the phase function here S is homogeneous of degree one in \xi and is a generating function for the half-wave group e^{-itP}. Thus, S solves the eikonal equation,
\partial_t S(t,x,\xi)= -p(x,\nabla_x S(t,x,\xi)), \quad
S(0,x,\xi)=x\cdot \xi,
and, if \Phi_t here denotes the Hamilton flow in T^*M\backslash 0 associated with p(x,\xi),
\Phi_{-t}(x,\nabla_x S)=(\nabla_\xi S,\xi),
and
\text{det } \bigl(\tfrac{\partial^2 S}{\partial x
\partial \xi}\bigr) \ne 0.
Additionally, by the above facts regarding \alpha\in S^0_{1,0}, for |t|<2\delta we have
\partial^j_t\partial_{x,\xi}^\beta
\alpha(t,x,\lambda \xi)=O(1) \, \, \,
\text{and } \, \, \,
\alpha(t,x,\lambda\xi)=0 \, \,
\text{if } \, \, |\xi|\notin [C^{-1}, C]]
for some uniform constant C.
By (?) and (?), we have
\tilde \sigma_\lambda (x,y)=(2\pi)^{-n-1}\lambda^n
\iint
e^{i\lambda [t+S(t,x,\xi) - y\cdot \xi ] }
\, \Hat \rho(t) \, \alpha(t,x,\lambda \xi) \, d\xi dt
+O(\lambda^{-N}).
This implies that
\begin{gathered}
K^{c_0\theta}_{\lambda,\mu}(x,y)
\\
=(2\pi)^{-2n-1} \lambda^{2n}
\iint e^{i\lambda [t+ S(t,x,\xi)-z\cdot \xi +(z-y)\cdot \eta ]} \,
\Hat \rho(t)\,
\alpha(t,x,\lambda\xi) \, A^{c_0\theta}_\mu(z,\lambda \eta)
dz d\xi d\eta dt \\
+O(\lambda^{-N}), \, \, \mu=\nu,\nu'.
\end{gathered}
By (?) and a simple integration by parts argument we have K^{c_0\theta}_{\lambda,\mu}(x,y)
=O(\lambda^{-N}) if d_g(y,\overline{\gamma}_\mu)\ge
C_1c_0\theta, \mu=\nu,\nu'.
If \mu=\nu, let us prove that this is the case also if d_g(x,\overline{\gamma}_\nu)\ge C_1c_0\theta, for large enough C_1. To do so, we note that by (?) and the fact that we are working in Fermi normal coordinates about \overline{\gamma}_\nu, we have
\begin{gathered}\nabla_\xi
(S(t_0,x_0,\xi)-z_0\cdot \xi
)=0,
\\
\text{if } \, \xi=(0,\dots,0,\xi_n), \, \, \xi_n>0, \,\,
x_0,z_0\in \overline{\gamma}_\nu \, \,
\text{and } \, x_0-z_0=t_0(0,\dots,0,1), \, \, t_0\approx \delta.
\end{gathered}
Note that for such x_0,z_0 we have t_0=d_g(x_0,z_0).
By (?) we have for t_0\approx \delta and z_0\in \overline{\gamma}_\nu and x near x_0
|\nabla_\xi (
S(t_0,x,\xi)-z_0\cdot\xi
)|
\approx d_g(x,x_0), \, \, \text{if } \,
\xi=(0,\dots,0,\xi_n), \, \, \xi_n>0.
By (?) and (?) this implies that we must have for t_0\approx \delta
\begin{gathered}
\bigl| \nabla_{\xi,\eta,z}\bigl(S(t_0,x,\xi)-z\cdot \xi +(z-y)\cdot \eta\bigr)\bigr| \ge c\theta,
\\
\text{if } \, \, d_g(x,\overline{\gamma}_\nu)\ge C_1c_0\theta, \, \,
\text{and } \, \alpha(t,x,\lambda\xi)A^{c_0\theta}_\nu(z,\lambda\eta)\ne 0,
\end{gathered}
for some constant c>0 if C_1 is fixed large enough. Since \theta\ge \lambda^{-1/8}, we obtain (5.4) for \mu=\nu from this and (?) via a simple integration by parts argument. We similarly obtain (5.4) for \mu=\nu' if we work in Fermi normal coordinates about \overline{\gamma}_{\nu'}. We obtain (5.4) from (5.4) since we are assuming that \nu-\nu'=O(1) which forces the O(c_0\theta) tubes described in (5.4) about \overline{\gamma}_\nu and \overline{\gamma}_{\nu'} to be a O(\theta) distance apart, and (x_1,\dots,x_{n-1})=0 on \overline{\gamma}_\nu.
It remains to prove that the kernels are as in (5.4) with amplitudes satisfying (5.4). Let
\Psi(t,x,y,z,\xi, \eta)=
t+S(t,x,\xi)-z\cdot \xi +(z-y)\cdot \eta
be the phase function in the oscillatory integral in (?). Then, at a stationary point where
\nabla_{z,\xi,\eta,t}\Psi=0,
we must have y=z and hence \Psi=d_g(x,y), due to the fact that S(t,x,\xi)-z\cdot \xi=0 and, as we just pointed out, t=d_g(x,y) at points where the \xi-gradient vanishes. Additionally, it is straightforward to see that
\text{det } \frac{\partial^2\Psi}{\partial(\xi,t)
\partial(\xi,t)} \ne 0.
This follows from the proof of Lemma 5.1.3 in [SFIO2]. It also clearly implies that the (3n+1) \times (3n+1) Hessian of the phase function in (?) satisfies
\text{det } \frac{\partial^2\Psi}{\partial(z,\xi,\eta,t)
\partial(z,\xi,\eta,t)} \ne 0.
Also, considering the z-gradient, we have \xi=\eta at stationary points. Thus, by (?), the oscillatory integral in (?) has an expansion (see Hörmander [HV1, Theorem 7.7.5]) where the leading term is a dimensional constant times
\begin{gathered}
\lambda^{\frac{n-1}2}e^{i\lambda t}
\, \Hat \rho(t)
\alpha(t,x,\lambda\xi) A_\mu(y,\lambda \xi),
\quad
\text{if } \, \, t=d_g(x,y), \, \,
p(x,\nabla_x S(t,x,\xi))=1, \, \,
\\
\text{and } \, \,
\Phi_{-t}(x,\zeta)=(y,\xi), \, \text{with } \,
\zeta=\nabla_x S(t,x,\xi) \, \, \text{and } \,
y=\nabla_\xi S(t,x,\xi).
\end{gathered}
Thus, here \xi=\xi(x,y)\in S^*_y\Omega is the unit covector over y of the unit-speed geodesic in S^*\Omega which passes through (x,\zeta) at time t=d_g(x,y), t\in \text{supp } \Hat \rho, and starts at (y,\xi) .
Consequently, since we are working in Fermi normal coordinates about \overline{\gamma}_\nu, it follows that \xi ((0,\dots,0,x_n),(0,\dots,0,y_n))\equiv (0,\dots,0,1) when (x_1,\dots,x_{n-1}) =(y_1,\dots,y_{n-1})=0. Consequently, we have \partial_{x_n}^j\partial^k_{y_n}\xi_\ell(x,y)=O(\theta), \ell=1,\dots,n-1, if the kernels are not O(\lambda^{-N}). Therefore, it follows from from (?) that
\Hat\rho(d_g(x,y)) \, \alpha(d_g(x,y),x, \lambda \xi(x,y)) \, A^{c_0\theta}_\mu(y,\lambda \xi(x,y))
satisfies the bounds in (5.4)
if (x,y) are not in the regions described in (5.4), (5.4) or (5.4) where the kernels are O(\lambda^{-N}). Thus, the leading term in the stationary phase expansions for the oscillatory integrals in (?) have the desired form. The same will be true for the other terms which involve increasing powers of \lambda^{-3/4} by a straightforward variant of [HV1, (7.7.1)].